Abstract
The ring opening is proposed to be the initial step in the unimolecular decomposition of a single-molecule precursor bisazido(dimethylaminopropyl)gallium (BAZIGA) used in a CVD process of gallium nitride. An efficient Monte Carlo importance sampling technique is developed to estimate the canonical partition functions and absolute entropies therefrom by taking the internal rotor hindrance and all coupling arising from the external and internal rotational degrees of freedom into account. This allows the estimation of the free energy difference in the ring opening process of BAZIGA to be made. Canonical flexible transition state theory is applied to the radical Ga–C bond homolysis in the unimolecular decomposition of BAZIGA. The limiting high-pressure rate constant is calculated using a simple model for the potential energy surface based on density functional calculations.
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