Abstract

The theories and techniques for improving machining accuracy via position control of diamond tool's tip and raising resolution of cutting depth on precise CNC lathes have been extremely focused on. A new piezo-driven ultra-precision machine tool servo system is designed and tested to improve manufacturing accuracy of workpiece. The mathematical model of machine tool servo system is established and the finite element analysis is carried out on parallel plate flexure hinges. The output position of diamond tool's tip driven by the machine tool servo system is tested via a contact capacitive displacement sensor. Proportional, integral, derivative (PID) feedback is also implemented to accommodate and compensate dynamical change owing cutting forces as well as the inherent non-linearity factors of the piezoelectric stack during cutting process. By closed loop feedback controlling strategy, the tracking error is limited to 0.8 μm. Experimental results have shown the proposed machine tool servo system could provide a tool positioning resolution of 12 nm, which is much accurate than the inherent CNC resolution magnitude. The stepped shaft of aluminum specimen with a step increment of cutting depth of 1 μm is tested, and the obtained contour illustrates the displacement command output from controller is accurately and real-time reflected on the machined part.

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