Abstract
We developed a disk-type non-contact ultrasonic motor based on B 22 vibration mode. The rotors of SU-8 photoresist are fabricated by the UV-LIGA process to control their shapes and thicknesses. So the structures of them are optimized by the experiments. It is found that the revolution speed of disk-type non-contact ultrasonic motor not only depends on the vibration amplitude of the stator, but also the weight and construction of the rotors. The maximum revolution speed of the optimal rotor is 3569 rpm at the input voltage of 20 V and the driving frequency of 45.6 kHz. The exciting principle of traveling wave is presented with theoretical equations. The electric signals applied to the piezoelectric ceramic are designed by the principle. The natural frequency and corresponding vibration mode are calculated and analyzed using finite element method. It is shown that experimental results are in good agreement with simulation, which verifies the effectiveness of the finite element model. Moreover, the levitation distance between the stator and rotor is measured by a CCD laser displacement transducer.
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