Abstract
Based on the principle of electrochemical reactions, the mechanism of electrochemical micromachining with ultra short voltage pulses was investigated and the theoretical model was developed. The effects of electrode gap and pulse parameters on the result of electrochemical micromachining were discussed. Using the self-developed experimental system, microtool-electrode and the complex microstructures were sequentially machined. Upon the application of ultrashort voltage pulses, the troughs with 20 μm in width were fabricated by φ 10 μm tool electrode produced.
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