Theoretical and Experimental Investigation of Using Multidegree of Freedom Electrostatically Actuated Microstructures in Performing Classification Problems

Abstract

This paper demonstrates the use of micro-electromechanical systems to perform an efficient classification problem. Classification using digital computers is inefficient due to its power requirement and the separation between memory and processing units. As a proof of concept, basic signal classification has been performed using a network of only three mechanically coupled devices. The classification occurred at the hardware level rather than using a digital computer. The classification problem involves distinguishing between a ramp signal versus a step input signal. In this demonstration, a three-degree of freedom model was built for the proposed network in MATLAB. Detailed simulation results were extracted to validate the network operation and sensitivity to operating conditions. Next, the device network hardware was fabricated and tested to perform the required classification problem. Good agreement between simulation and experiment is demonstrated.