Theoretical and experimental investigation of pulsed laser grooving process

Abstract

A theoretical model has been developed for simulating the laser grooving process. It takes into account the interaction among subsequent pulses, the required time for the melting temperature to be reached and the subsequent removal of a finite volume of material during each laser pulse. The model predicts the maximum groove depth that can be achieved for a specified set of process parameters, such as laser power, pulsing frequency, and scanning velocity. The theoretical predictions have been experimentally tested with a medium-power laser beam.