Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators

Abstract

In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Qs value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Qs value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Qp values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k2eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.