Abstract
Under-display ultrasonic fingerprint imaging presents a promising approach for smart terminal device authentication, which requires ultrasonic waves to penetrate organic light-emitting diode (OLED) screen composed of multiple layers, necessitating ultrasonic sensors with high sensitivity. To address this issue, this study first establishes a physics-based multi-layer model that describes the ultrasonic wave propagation behavior in an OLED screen. The optimal design parameters of the ultrasonic fingerprint sensor are explored by using the multi-layer model and the Krimholtz-Leedom-Matthaei (KLM) model. A PIN-PMN-PT single crystal-based micro-sized ultrasonic sensor with a center frequency of 33 MHz is then successfully fabricated, simultaneously achieving small aperture size (300 µm × 300 µm) and high performance. The sensor exhibits a broad bandwidth (−6 dB: 77.01 %) and high sensitivity (−42.55 dB), as well as superior spatial resolution (lateral: 112.48 μm, axial: 45.06 μm). This study provides valuable design guidance for enhancing ultrasonic fingerprint sensor performances.
Published Version
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