Abstract
Longitudinal leaky SAW (LLSAW)modes on monolayer piezoelectric substrates possess a high attenuation which cause a low Q factor. Our group reported that the attenuation of LLSAWs was reduced by loading a high velocity AIN film on LiNb0 3 (LN)or LiTa03 substrate. We expected that a high K2, high phase velocity, and low attenuation in LLSAW would be obtained by loading the giant piezoelectric ScAIN film on the piezoelectric single crystal substrate. In this study, LLSA W propagation characteristics on ScAIN films/piezoelectric single crystal substrates (quartz and LN)were theoretically analyzed to investigate the optimized layered structure for LLSA W devices. The K2 maximum of 20% at ScAIN film thickness h/λ=0.09 on (0° 90° 90°)ScAIN/X36°Y LN was approximately 1.4 times higher than that of X36°Y LN. However, the attenuation was not reduced in the ScAIN/LN structure. On the other hand, the attenuation minimum of 0.02 dB/λ was observed at h/λ=0.1 on (0° 90° 90°)ScAIN/AT45°X quartz. The K2 of 7% at h/λ =0.1 in the ScAIN/quartz structure was higher than that of approximately 5% in a standard LSAW device with a 36°−42°YX LT substrate for frequency filters. These theoretical results suggest that the layered structure with ScAIN/quartz may have a high Q and high K2 in LLSAW devices.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
