The wet corrosion of molybdenum thin film – Part III: The effect of Ti and Nb

Abstract

AbstractMagnetron sputtering has become the process of choice for the deposition of a wide range of industrially important coatings. Over the last decade, interest in molybdenum thin films prepared by magnetron sputtering has been increasing; however, little research has been done on molybdenum‐titanium and molybdenum‐niobium alloy thin films. During the current study, electrochemical impedance spectroscopy (EIS) was employed to investigate the effect on the corrosion resistance in basic chloride environments of adding titanium and niobium species to molybdenum thin films deposited by physical vapor deposition. The results indicate that the MoTi alloy thin films exhibit better protective properties than either the molybdenum‐niobium alloy or unalloyed molybdenum thin films.