The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design

Abstract

This paper designs a micro-pump silicon diaphragm vibration pickup sensor. In this newsensor which is based on piezoresistive effect, four MOSFETs with nc-Si/c-Si heterojunction drainand source are manufactured on the surface of silicon wafer by using the technique of CMOS andPECVD, at edge of <100> orientation of the N-type silicon diaphragm rectangle, and using MEMStechnology, the back of the four MOSFETs device silicon substrate processed into silicon cup, whichconstitutes the vibration pickup sensor. The micro-pump silicon diaphragm vibration pickup sensornot only has all the advantages of conventional force sensitive resistance vibration pickup sensor, butalso has the advantages of small temperature drift, high detection precision, and it can satisfy themicro-pump silicon diaphragm vibration requirements.