Abstract
For certain applications the small size characteristics of MEMS structures can be traded off for low cost production and high manufacturing yields. This is the realm of meso-scale (intermediate scale) electromechanical systems. Low temperature co-fired ceramic tape materials offers the potential of emulating a great deal of silicon MEMS technology at the meso scale level. In this article we show the design, construction, characterization and modeling of a thermistor based flow sensor totally constructed using LTCC tapes and the hybrid microelectronics technology.
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