Abstract
AbstractAn on‐line digital image processing system provides several useful functions to SEM users. It is especially convenient for general SEM image storing and filing, preferable to conventional methods using video monitor, camera, and film. When equipped with state‐of‐the‐art magneto‐optical disk unit (external memory) and a video copy processor for printout of a digital SEM image, its usefulness is enhanced. In order to validate this useful function, we compare a modern on‐line digital image recording system with a conventional one, from the viewpoint of the general SEM user.
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