Abstract

Once it is understood in terms of wave optical transfer theory, tilted beam bright-field illumination can be applied to a variety of high resolution microscope problems which encompass lattice imaging and imaging nonperiodic objects. The tilted beam method offers the advantages of increasing the resolution and allowing both elastically and inelastically scattered electrons to contribute to high spatial frequency detail in a micrograph. In the simplest case, one can demonstrate these effects by the conventional lattice imaging mode using a single diffracted beam and the direct transmitted beam positioned symmetrically on either side of the microscope optic axis. However, the transfer theory of the microscope for tilted beam illumination shows that the cancellation of chromatic aberration occurs not only for the one diffraction direction across the optic axis from the unscattered beam, but also for an entire circle centered about the axis in the back focal plane (BFP) of the microscope.

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