Abstract
Structures based on piezoelectric materials are now fi nding applications in different fi elds related to monitoring and control of vibratory and periodic motions of different structures [1, 2]. Such structures may be used not only for vibration damping or control of given deformation regimes. The use of piezoelectric materials is critical for the creation of new sensing elements of sensors of physical quantities based on monocrystalline silicon, silicon carbide, and other materials. In the present article we will be giving a preliminary analysis of a string (frequency) sensing element made of crystalline silicon possessing a piezoelectric structure based on fi lms of lead zirconate-titanate PbZr 0.48 Ti 0.52 O 3 and functioning in a self-excited oscillator regime.
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