Abstract
A nuclear microprobe, with a focused MeV ion beam, may be used to perform microchanneling measurements on small crystals less than 50 μm in diameter. Information can be provided that is difficult to obtain by other techniques. The measurements can be used to provide information about the crystal structure and orientation. Also, the crystal quality and lattice location of dopants can be measured. One barrier to more widespread application of the technique is that the small size of the crystal imposes stringent restrictions on the amount of lateral movement tolerable as a crystal axis is tilted into alignment with the analysis beam. Two novel techniques for overcoming this problem are discussed and contrasted here. Both techniques involve angular scanning of the ion beam.
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