Abstract
A new monoenergetic, high-brightness ion source can be constructed using an arrangement similar to liquid metal ion sources by substituting the liquid metal with an ionic liquid or room-temperature molten salt. Ion beams produced by these ionic liquid ion sources (ILISs) have energy deficits and distributions that closely resemble their metallic counterparts, with the exception that they can be stably operated at current levels as low as a few nanoamperes if needed. ILISs are here presented as having two further key advantages: (1) the ability to obtain both positive and negative ion beams and (2) the ability to produce very diverse molecular ions in terms of their masses, compositions, and properties due to the fact that the number of available ionic liquids is large. In this article an overview of ILISs is presented, as well as preliminary results of their performance in a focused ion beam column.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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