The unusual tribological behavior of diamond‐like carbon films under high vacuum

Abstract

We fabricate F‐doped and F‐S‐codoped diamond‐like carbon (DLC) films using plasma‐enhanced chemical vapor deposition system. The hardness, Raman spectra, and high‐vacuum tribological behaviors indicate that the films are DLC films. The hardness is close related to the tribological properties of DLC films under high vacuum. The high hardness of DLC films would be helpful for obtaining the long lifetime under high vacuum. The lifetimes of F‐S‐codoped DLC films are about 120 and 140 seconds, which is attributed to the fast graphitization under high vacuum. The lifetime of F‐doped DLC films is prolonged to the value of around 300 and 440 seconds, X‐ray photoelectron spectroscopy analysis exhibits the existence of the “adsorption” F, and transmission electron microscopy analysis shows that the “adsorption” F could react with Fe to form layered FeF2 nanocrystal at the initial sliding, which could be helpful for prolonging the lifetime of F‐doped DLC films under high vacuum. This investigation opens a new window to overcome the disadvantage of F, S‐doped DLC films under high vacuum.