Abstract
The use of low temperatures to improve the performance of steel products is a widely used technology in mechanical engineering. Another directionof increasing the efficiency of machine parts and mechanisms is the creation of thin-layer systems using vacuum technologies. The combinationof these technological approaches made it possible to obtain antifriction vacuum superhard coatings with increased tribotechnical characteristics.The effect of increasing the wear resistance of hybrid coatings is the formation of nanodisperse structures in the steel substrate and coating, the decayof residual austenite, which leads to an increase in martensite in the structure of steel subjected to cold treatment, a significant change in the values ofinternal stresses in superhard coatings.
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