Abstract
Zr-C:H x% coatings are deposited on AISI M2 steel disks using an unbalanced magnetron (UBM) sputtering method with a single zirconium metal target, three graphite targets and various CH 4 reactive gas flow rates in the range of 0–5 sccm. The results show that the CH 4 flow rate has a significant effect on the microstructural, adhesion and tribological properties of the coatings. Specifically, the microstructure changes from a columnar form to a featureless morphology as the CH 4 flow rate increases. Furthermore, an increasing CH 4 flow rate increases the coating hardness and results in a lower wear depth and friction coefficient under sliding with an AISI 1045 steel cylinder.
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