Abstract
An analysis model is established to study the accumulation processes of temperature and stress in an anti-reflective coating with multi-pulse laser irradiation. Specifically, the influence of pulse interval on the thermal-stress accumulation effects is discussed in detail. Furthermore, the accumulations of temperature and stress dependence of pulse energy are discussed. The results show that stress has the same accumulation rules as temperature. The pulse interval has major impact on the accumulation process. When the time of pulse interval is close to the cooling time of material, the accumulation effect is not obvious. Furthermore, the accumulations of temperature and stress are more obvious with increasing pulse energy.
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