Abstract
The effects of operating conditions in a self-assembly of a horizontal reactor for metalorganic chemical vapor deposition are investigated and described by simulation and analysis. The parameters are involved such as space between the top wall and the susceptor (30-60 mm), the reactor top wall temperature (41-161 ºC), the chamber pressure (100-760 torr), and the susceptor rotation rate (0-150 rpm). The simulation results from these listed parameters show that an optimization for an ideal stagnation flow can be achieved in a horizontal reactor
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
