Abstract
A complete chromium oxide passivation technology has been developed for stainless steel surfaces for use in high purity gas‐delivery systems and process chambers. Starting with an electrochemical buffing (ECB) to add to electropolished (EP) SUS316L stainless steel material, an optimal thermal treatment was found by using a gas mixture of 10% hydrogen, 1–10 ppm oxygen and argon balance gas at 500°C for 1 h. Five‐day corrosion tests with gas (containing 1.4 ppm moisture) at 5 kg/cm2 and 100°C showed no sign of corrosion on the chromium oxide passivated surface. Chemical stability tests on this surface with silane specialty gas thermal decomposition also showed a remarkable noncatalytic activity compared with conventional surfaces.
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