The surface blistering kinetics and the H-platelet evolution in H-implanted germanium

Abstract

The surface blistering phenomenon produced in H-implanted Ge by a series of low temperature annealing processes was investigated. The kinetic plot of the onset of blistering contains a break point that separates the straight-line plot into two parts, with two distinct slopes based on the calculated activation energy from the different temperature regions for 3×1016cm−2 and 5×1016cm−2 H-implanted doses. This plot indicates the existence of distinct, temperature dependent mechanisms, probably caused by the release of different types of H-platelets. The turning direction (from low to high temperature) of the Arrhenius plot with the break point is contrary to that of other known materials. The formation and evolution of the H-platelets under the Ge surface was revealed by TEM (transmission electron microscopy). The TEM results demonstrate that the 〈001〉 platelets parallel to the sample surface are first produced by a low H implantation dose; however, the vertical 〈010〉 platelets perpendicular to the sample surface form later as the H implantation dose increases. The H-platelets combine with each other, becoming micro-cracks. The {111} and {311} micro-cracks serve as interconnections between the 〈001〉-oriented micro-cracks below the substrate surface. Finally, the accumulated H2 pressure in the cracks deforms the surface to generate Ge surface exfoliation.