The study of the structural phase state and properties of impact resistant Zr-Y-O coatings systems on Si substrates

Abstract

The results of studies of the microstructure, phase composition, physical and mechanical properties of coatings of the Zr-Y-O system with a thickness of 3 µm on single-crystal Si substrates produced by pulsed magnetron deposition are presented. The results of the laboratory tests of the impact resistance of the silicon samples with protective coatings of the Zr-Y-O system to shock loads, during the interaction of a stream of Fe microparticles moving at a speed of 5 km / s. are given. According to the data of X-ray and TEM, it was establisheded that the composite coatings of the Zr-Y-O system had a submicrocrystalline columnar structure (dav=46–200 nm) and contain the ZrO2 phase in the monoclinic and tetragonal modifications. The study of the optical properties of the samples has shown that the coefficient of light transmission for these coatings varies from 70 to 80% in the wavelength range of 400–800 nm. It has been found that the application of the protective coatings of the Zr-Y-O system with a thickness of 3 µm on the surface of the silicon samples leads to increasing in their microhardness from 14 to 19 GPa. Under laboratory conditions, shock tests have shown that the application of these protective coatings of the Zr-Y-O system allow suppressing the processes of erosion in the latter. This is due to the prevention of the formation of small craters, whose size does not exceed 30 µm, as well as due to a considerable decrease in the number of the craters with size from 30 to 50µm.