Abstract
In this paper, SiC films were deposited on the surface of 316L stainless steel by magnetron sputtering with sintering SiC target to improve its wear resistance. The structure and morphologies of the SiC films were characterized by XRD and SEM. The impacts of sputtering way, deposition time, and substrate temperature on the deposition rate and mechanical properties of SiC films were further investigated by the performance parameters of hardness, elastic modulus, friction and wear properties, coating adhesion, etc. The results show that coating adhesion is higher when the films are deposited by mid-frequency magnetron sputtering than that of which by direct current sputtering; Hardness and elastic modulus of the films increased gradually with the deposition time changing from 1 to 5h or the substrate temperature changing from room temperature to 200°C; However, the friction coefficient initially decreases, but turns to increase with the deposition time prolonging or the substrate temperature rising. The wear resistance of the films is the best when deposition time is 2h and substrate temperature is 100°C.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
