Abstract
We simulated the microwave sintering of ZnO by 3D modelling. A large-size Al-doped ZnO (AZO) green ceramic compact was prepared by slurry casting. Through studying the microwave and electric hybrid sintering of the green compact, a relative density of up to 98.1% could be obtained by starting microwave heating at 1200°C and increasing the power 20 min later to 4 kW for an AZO ceramic target measuring 120 × 240 × 12 mm. The resistivity of AZO targets sintered with microwave assistance was investigated. The energy consumption of sintering could be greatly reduced by this heating method. Until now, few studies have been reported on the microwave and electric hybrid sintering of large-size AZO ceramic targets. This research can aid in developing sintering technology for large-size high-quality oxide ceramic targets.
Highlights
Because of the high optical transmittance and low resistivity of transparent conducting oxide (TCO), TCO films are applied in many electronic devices such as solar cells, flat displays, and touch panels [1,2,3,4]
Some researchers have found Al-doped ZnO (AZO) film to be a potential alternative to Indium tin oxide (ITO), with optical and electrical properties approaching those of the conventional material [5,6,7]
This study addresses the technology of microwave and electric hybrid sintering to prepare large-size (≥100 × 200 × 10 mm) AZO ceramic targets with high density (≥98%) for magnetron sputtering
Summary
Because of the high optical transmittance and low resistivity of transparent conducting oxide (TCO), TCO films are applied in many electronic devices such as solar cells, flat displays, and touch panels [1,2,3,4]. Some researchers have found Al-doped ZnO (AZO) film to be a potential alternative to ITO, with optical and electrical properties approaching those of the conventional material [5,6,7]. The method requires oxide ceramic feed materials with the same components and quality as the sputtering target. As the most important step in preparing the target, has been studied by many researchers, but most studies have investigated electricity as the sintering power [8,9,10,11,12]. The obvious drawbacks of this method include power wastes and the possibility of cracking the ceramic target, as the temperature distribution is not homogeneous during sintering. This study addresses the technology of microwave and electric hybrid sintering to prepare large-size (≥100 × 200 × 10 mm) AZO ceramic targets with high density (≥98%) for magnetron sputtering
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