Abstract
Based on the equivalent simplified model of the vibrating beam, the equivalent RLC circuit of vibrating-beam-type resonant accelerometer is described in detail, which shows that equivalent circuit contains a variable capacitances and a variable resistances due to the acceleration. Using the electromechanical coupling factor presented here and the mode function of the transverse deflection vibration of the double clamped beam, the equivalent parameters of the accelerometer with the size of the beam and comb are derived. These results are the bases of designing the drive /sense circuit of the vibrating-beam-type accelerometer.
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