Abstract
Titanium oxide and titanium nitrogen gradient films were prepared by three different processes using metal plasma immersion ion implantation and deposition (MPIII-D). The mechanical properties of the films synthesized on silicon wafers, Ti6A14V and low temperature isotropic carbon (LTIC) were evaluated by nano-indentation, pin-on-disc wear, and scratching test. The hardness of the film was measured to be 19.5 GPa. Investigation by XRD shows that the surface Ti–O layer possesses a rutile structure and analysis by X-ray photoelectron spectra (XPS) discloses that the surface composition of the synthesized TiN/Ti–O films is non-stoichiometric. The gradient characteristics of the films were corroborated by qualitative analysis of secondary ion mass spectroscopy (SIMS). The thickness of films was 510–940 nm. Platelet adhesion experiments adopted to estimate the blood compatibility of the films show that the adsorption and deformation of platelets on the synthesized TiN/Ti–O gradient films have been significantly suppressed compared to LTIC. Scanning electron microscopy (SEM) used to assess the wear and scratch tracks discloses that the films exhibit good wear resistance and high adhesion strength.
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