Abstract
We report on the growth of single cubic-phase MgZnO thin films by reactiveelectron beam evaporation on sapphire substrates. A detailed theoreticalprocedure has been employed to analyse the transmission profile for informationon composition non-uniformity, in addition to the exact determination of the bandgap energy. The study of composition non-uniformity has been further extendedto both the typically reported hexagonal and cubic MgZnO thin films. It is foundthat the composition non-uniformity strongly depends on the Mg content,which can be well explained by the ZnO–MgO phase diagram.
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