Abstract
Transmission electron microscopy (TEM), electron energy-loss spectroscopy (EELS), and energy dispersive X-ray analysis (EDX) have been performed on thin zirconia films produced by means of self-assembled monolayer (SAM) mediated deposition from aqueous zirconium sulfate dispersion at 50 °C. As-grown films were found to be amorphous. Electron beam irradiation can induce crystallization of the as-grown amorphous zirconia films to tetragonal polycrystalline ZrO 2 films. EELS revealed changes in the oxygen K-edge peak caused by the beam-induced structural transition of the amorphous phase to tetragonal ZrO 2.
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