Abstract
The microstructures and compositions of multicomponent Ti–B–N, Ti–Si–B–N, Ti–Si–C–N, and Ti–Al–C–N films deposited by reactive magnetron sputtering using composite targets and produced by self-propagating high-temperature synthesis (SHS) have been investigated by means of transmission electron microscopy. Auger spectroscopy, and X-ray diffraction. Depending on the chemical composition of the film deposited, different single-phase crystalline films were observed. The sputtering process included sputter cleaning prior to the DC magnetron sputter deposition of Ti and TiN interlayers prior to DC magnetron sputter deposition of the multicomponent films from multicomponent targets. The films produced were characterized in terms of their microhardness, wear resistance, high-temperature oxidation conducted in air. and corrosion resistance in a solution of 5NH2SO4 at room temperature.
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