Abstract
This article reports the results of comparative studies of the composition, structure, high-temperature oxidation resistance, mechanical and tribological properties of (MoTaNbZrHf)-Si-B coatings prepared at an identical average power of 1 kW by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS). Switching from the DCMS to the HIPIMS mode is found to increase adhesion and crack resistance of the coatings and their wear resistance under friction sliding and cyclic impact conditions, as well as reduce the depth of oxidation at 1300 °C threefold. The record-breaking values of high-temperature oxidation resistance at 1500 °C are achieved due to formation of a surface film based on the borosilicate glass (a-Si:B:O) containing crystallites of the t-HfSiO4, o-Ta2O5, m-HfO2, and m-ZrO2 phases.
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