Abstract
Micro-mechanical properties of electrodeposited cobalt films were investigated by micro-compression tests for application in miniaturized magnetic electronic devices. FCC and HCP crystal structures were both present in the electrodeposited cobalt. Nanotwins were also confirmed in the HCP lamellas. The average grain size was ranged from 13.8 to 15.4 nm obtained from the Scherrer equation. Yield strengths of the micro-pillars were ranged from 948 to 1075 MPa, which were about twice that of the bulk cobalt. The high yield strength obtained from the micro-compression test was a result of the fine grain size and the small sample size used in the compression test, which correspond well to the Hall-Petch relationship and the sample size effect, respectively.
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