Abstract
Mn and Y alternately doped Ba0.6Sr0.4TiO3 film, denoted as Mn/Y-BST film, has been designed and prepared by improved sol–gel method, and the structure and dielectric properties of the film have been studied. Y or Mn doped BST film is also studied. X-ray diffraction reveals that all films grow along (110) orientation and show polycrystalline cubic perovskite structures, and Y3+ and Mn2+ ions enter into B-sites of ABO3 perovskite structure and substitute Ti4+ ions. The Mn/Y-BST film reveals better crystallization with larger crystal grain size. Atomic force microscopy and scanning electron microscopy confirm that the Mn/Y-BST film exhibits better crystallization. X-ray photoelectron spectroscopy shows that the Mn/Y-BST film presents less surface non-perovskite structure. Accordingly, the Mn/Y-BST film exhibits significantly nonlinear improvement in combination of dielectric properties. These results indicate that Mn/Y alternate doping is a novel route to excellent BST films for tunable microwave applications.
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