Abstract
A confocal experimental scheme with two polycapillary lenses is used to analyze the nearsurface layers of samples by X-ray fluorescent microanalysis with an accuracy of up to 10 μm. To increase the spatial resolution, it is required to account for the influence of the spread function of the confocal X-ray optical node. It is interesting to experiment with a tunable aperture of the confocal volume. In this case, the contribution of tuning inaccuracies in the spread function can increase. A method for describing the spread function of a confocal X-ray microscope that allows for its retuning and accounts for the effect of the angular tuning errors is proposed and experimentally proved. The method is based on the use of an approximating expression of the type of asymmetric approximation of the “Gaussian beam caustic”.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
