Abstract
Due to necessary requirement of product processing, the re-entrant manufacturing system, which has re-entrant property, is different from general manufacturing system or reworking. The frequency of re-entry is far more than general manufacturing system, which will lead to the WIP work-in-process competing for one equipment in different phrases of production. The production load of the equipment fluctuates randomly, so that it's impossible to make precise prediction on arriving time of WIP. Since the semiconductor manufacturing system is a typical representative of re-entrant manufacturing, the paper taking Mini-fab as an example to simulate, makes research on re-entrant manufacturing system and analyzes the quantity of output and the WIP under different feed rates by means of modeling and ExtendSim simulation.
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