Abstract

cess processed and become uniform when the microlens fully formed.The curvature radius is not only affected by the value of the surface tension but also influenced by the mould size as well as the column structure.Smaller mould size results in smaller curvature radius.The curvature radius will be decreased as the result of the formation of the column sturcture. At last,The influence of the main imprint process parameters on the forming process of the microlens was analysed.The polymer microlens was perfectly produced by using the non-contact method under proper processing conditions.

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