Abstract
A novel microwave measurement technique involving the transmission of a microwave signal through a resistive film was demonstrated. The sheet resistance of thin metallic NiCr and Al films were measured at 130 GHz. The thickness of the films was much less than the skin depth. Further measurements were made on NiCr and Al stripes of 4 μm in width, and a patterning technique was proposed that extend the measurement range well below 1 Ω/□. These measurements showed that the conductivity of the films and stripes has a similar value at both DC and 130 GHz.
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