Abstract

Abstract This paper analyzes a solid state magnetic sensor called the “sheer-contact magnetic field sensitive resistor” (SC-MAGRES). The geometry of this device features no lateral insulation and is determined by the contacts only, thus, it can be manufactured with a minimal number of masking steps. Its applications are in the micro-electro-mechanical-systems (MEMS)-area with low-cost sensor-applications using non-standard processes. An equivalent circuit for use in circuit simulators as well as models of the device resistors and sensitivity are presented and compared to measurements which show a maximum sensitivity of 17 μA/VT. Other measurements show a maximum resolution of 120 nT as well as the offset of the device. A comparison to similar magnetic sensors concludes the analysis, together with an investigation of optimization strategies.

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