The Separation Measurement of $P$ -Hit and $N$ -Hit Charge Sharing With an “S-Like” Inverter Chains Test Structure

Abstract

In this paper, an “S-like” inverter chains (SLIC) test structure is designed for the separation measurement of $N$ -hit and $P$ -hit charge sharing. The heavy-ion experiments were performed in 65-nm bulk dual-well and triple-well technology, and the $N$ -hit and $P$ -hit pulse quenching (PQ) span is attained. The results has verified the ability of the “SLIC” test structure to characterize $P$ -hit and $N$ -hit PQ, and the results also indicate that the N+ deep well can enhance the action extent of $N$ -hit charge sharing greatly though it will reduce the action extent $P$ -hit charge sharing.