Abstract
The Seebeck effect in silicon is investigated to evaluate its usefulness for an integrated temperature difference sensor. The theory of the Seebeck effect is briefly explained and some details of the integrated thermopile, the device exploiting the Seebeck effect, are discussed. The experimental results of the measurements are presented, and the maximum attainable sensitivity, which appears to be of the order of 5 to 50 mV/K for thermopiles with internal resistances of 2 kΩ to 200 kΩ, is calculated. It is concluded that the absence of offset, the high sensitivity and the wide operational temperature range make the thermopile a very valuable transducer.
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