Abstract
SrTi1-xFexO3 thin films were grown on Si substrates with a double buffer layer of ceria and yttria-stabilized zirconia at various temperatures, oxygen pressures and Fe contents. Films with in-plane compressive strain and an oxygen deficiency have a strong magnetic anisotropy with an out-of-plane easy axis, whereas films deposited at low temperature and in an oxygen atmosphere have no ferromagnetism at room temperature, which is attributed to the lack of lattice strain.
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