Abstract

We have studied the solid state dewetting of ten monolayers thick Ag film deposited on periodically patterned Si(557) surface. The annealing of the system in the ultra-high vacuum at the temperatures between 300 and 400 °C resulted in full agglomeration of the film and formation of faceted single crystalline Ag nanoparticles exhibiting bimodal size distribution. We demonstrated that some particles contain screw dislocations producing a step on the upper particle facet. We related the bimodality in particles distribution with the ability of dislocation-containing Ag particles to evolve by Ostwald ripening mechanism.

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