The role of abnormal grain growth on solid-state dewetting kinetics

Abstract

Continuous thin films of Pt on A-plane 112¯0 sapphire substrates were dewetted to characterize the morphological evolution and dewetting kinetics at 800°C using an oxygen partial pressure of 10−20atm. Hole growth was studied, focusing on partially dewetted samples. Four different low-index orientation relationships were found between the Pt and sapphire substrate by electron backscattered diffraction combined with transmission electron diffraction patterns. Abnormal grains adjacent to the holes with a small deviation from one of the low-index orientation relationships were observed. The difference in the heights of the abnormal grains adjacent to the holes (rim-height) is influenced by the initial position of the hole, and the existence of grains with a low-energy interface orientation relationship, and not only by diffusivity rates dictated by surface orientation as described in existing edge-retraction models. The existence of low-index orientation relationships is seen as the driving force for abnormal grain growth in the vicinity of the holes, and is a dominant factor in controlling the dewetting rate of thin metal films on oxide surfaces.