Abstract

This dissertation mainly studies the situation of the microwave excited plasma in the circular waveguide mode converter and the cylindrical cavity of the converter. In the S-band, a mode converter from rectangular waveguide TE <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">10</sub> mode to circular waveguide TE01 mode is designed. The structure of the mode converter is theoretically analyzed. And through HFSS software simulation, the electromagnetic field distribution in the mode converter is analyzed. An experimental platform was built with a klystron and the mode converter, and the cylindrical cavity was filled with carbon dioxide laser standard gas to study and observe the plasma excitation, which laid the foundation for further research on microwave plasma lasers.

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