Abstract
The digital probe instrument is used for measure the microwave impedance of electronic circuit, which request both the precision and resolution of 3d displacement of the probe at the level of 1~2μm.As there are a lot of the points to be measured, it is a high labor intensity and low efficient work when person moving and positioning the right position through high magnification microscopy only by eyes, as well as some points that should be measured are easily ignored. A double-3d displacement sliding table consists of grating digital system is proposed in the paper, which could solve the problems successfully.
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