Abstract
The research of the nano-mechanical properties on mono-crystalline silicon by nanoindention technology is reported in this paper . Using the calculation method given by Oliver and Pharr, the hardness and the elastic modulus of mono-crystalline silicon are gained from the load-penetration depth curve. The simulation on mono-crystalline silicon in the plastic phase is carried out by ABAQUS. Based on the bilinear constitutive law and approximate relationship between the hardness and the yield strength, the obtained load-penetration depth curve through the finite element method is compared with the materials actual load-penetration depth curve and good correlation is achieved.
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