The research of differential reference electrode arrayed flexible IGZO glucose biosensor based on microfluidic framework

Abstract

This study used a fast, simple, and low-cost method to fabricate arrayed flexible glucose biosensor, and the glucose biosensor was integrated with microfluidic framework for investigating sensing characteristics of glucose biosensor at the dynamic conditions. The indium gallium zinc oxide (IGZO) was adopted as sensing membrane and it was deposited on aluminum electrodes / polyethylene terephthalate (PET) substrate by the radio frequency sputtering system. Then, we utilized screen-printed technology to accomplish miniaturization of glucose biosensor. Finally, the glucose sensing membrane was composed of glucose oxidase (GOx) and nafion, which was dropped on IGZO sensing membrane to complete glucose biosensor. According to the experimental results, we found that optimal sensing characteristics of arrayed flexible IGZO glucose biosensor at the dynamic conditions were better than at the static conditions. The optimal average sensitivity and linearity of the arrayed flexible IGZO glucose biosensor were 7.255 mV/mM and 0.994 at 20 µL/min flow rate, respectively.