Abstract
VC/TiN nanomultilayers with different modulation structure have been synthesized by magnetron sputtering method. These multilayers were designed to reveal the relationship between superhardness effect and modulation structure. Based on the research results of microstructure and interface characteristics,a design map of modulation parameter with four regions was proposed. In these four regions, superhardness effect could only be generated in the region with sharp interface and epitaxial growth structure, and the maximum hardness reaches 45.8GPa. Losing these microstructure characteristics, the superhardness effect of multilayers would disappear.
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